Semiconductor

APPLICATIONS

INDUSTRY
(FACILITY)
SERVICE PARAMETER RANGE BACKGROUND TELEDYNE MODEL
Bulk gas analysis Ultra high purity inert gases used in fabrication of wafers PPB O2 0-50 ppb 0-50 ppb BDS-3000 Series
1. Gas phase etching - blanketing
2. Annealing furnace - blanketing
3. Deposition of Dopant - carrier gas
4. Pipe line verification - leak check
5. Analysis at point of use - at tool location
Excimer laser system Laser exciter / F2 mixer gases % F2 0-2, 0-7% He or Neon Series 6000 UV